Structure of tin oxide layers and operating temperature as factors determining the sensitivity performances to NO(x)Funded under: JRC-ADVMAT 1C
Thin SnO(2) layers have been prepared and characterised by ellipsometry, Auger spectroscopy, XPS and X-ray diffraction analysis for their thickness and structure in order to be tested as NO(2) sensors. The experiments were carried out both in pure nitrogen and in nitrogen:oxygen (4:1 vol) mixture. The process of adsorption of NO(2) on tin oxide results in a build up of a carrier depletion layer and therefore a net decrease of the electrical conductivity. In nitrogen:oxygen mixtures this process competes with those pertaining to the oxygen molecule. The maximum sensitivity for the detection of NO(2) in N(2):O(2) mixture was found at approximately 210 C. This sensitivity position results from the minimum density of acceptors induced at this temperature by the multistep oxygen ionosorption processes.
Bibliographic Reference: Paper presented: EUROSENSORS VI, San Sebastian (ES), October 5-7, 1992
Availability: Available from (1) as Paper EN 37167 ORA
Record Number: 199211353 / Last updated on: 1994-11-29
Original language: en
Available languages: en