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Abstract

For application of DLC films in a variety of devices the knowledge of their mechanical and thermal properties is of both fundamental and technological interest. To investigate these properties, films of a-C and a-C:H were deposited by means of dual ion beam sputtering, direct ion beam deposition and sputter assisted plasma CVD. Samples with different sp(3)/sp(2) ratios were obtained. The ratio sp(3)/sp(2) was deduced from the experimental values of the complex dielectric constant as obtained by optical transmittance and reflectance measurements. Measurements of hardness H and elastic modulus E were performed by means of ultra-low load nanoindentation. The yield stress Y and the ratio H/E were deduced. To study the thermal properties of the samples, the photo displacement technique, in the temperature range from 10 to 300 K, was used. Since the conductivity of the sp(3) matrix largely controls the mechanical and thermal properties of DLC films, the results obtained allow the physical properties to be related to the atomic structure.

Additional information

Authors: DEMICHELIS F, Politecnico Torino, Dipartimento di Fisica (IT);PIRRI C F, Politecnico Torino, Dipartimento di Fisica (IT);TAGLIAFERRO A, Politecnico Torino, Dipartimento di Fisica (IT);DUNLOP E D, JRC Ispra (IT);HAUPT J, JRC Ispra (IT);GISSLER W, JRC Ispra (IT)
Bibliographic Reference: Paper presented: DIAMOND 92, Heidelberg (DE), August 31 - September 4, 1992
Availability: Available from (1) as Paper EN 37085 ORA
Record Number: 199211364 / Last updated on: 1994-11-29
Category: PUBLICATION
Original language: en
Available languages: en