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The new scanning nuclear microprobe facility of the Central Bureau for Nuclear Measurements (CBNM) in Geel, Belgium, is described. A proton or He(+) beam is focused down to 2.5 x 2.5 microns(2) by means of a magnetic quadrupole doublet. This spot size is rapidly and routinely achieved with a beam current of 100 pA, using a newly devised focusing procedure based on the observation of grid shadows. Elemental analysis, using both particle induced X-ray emission (PIXE) and Rutherford backscattering spectrometry (RBS), as well as the detection of secondary electrons for surface topography imaging are implemented. A comprehensive, user-friendly computer system facilitates flexible real-time elemental mapping and analysis of incoming data in a menu style fashion. In addition, the complete data stream can be collected in a list-mode fashion or as spectra pixel by pixel for later off-line and detailed analysis. An example of high-efficiency RBS analysis, making use of a custom-built implanted silicon detector subtending a large solid angle, demonstrates the potential of this analytical instrument for materials research.

Additional information

Authors: WÄTJEN U, JRC Geel (BE)
Bibliographic Reference: Paper presented: 3rd International Conference on Microprobe Techniques and Applications, Uppsala (SE)
Availability: Text not available
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