Study of the properties of an argon glow discharge with titanium cathode using a Langmuir probe and laser induced fluorescence
In this work an abnormal argon glow discharge has been investigated. The results presented are the measurements and calculations concerning the electron beam plasma in the negative glow. Two diagnostics have been employed to determine the plasma parameters. A Langmuir probe has been used in the negative glow to measure the spatial distributions of the electron density, temperature and the plasma potential. The density distribution of titanium atoms, ions and 3P(2) metastable argon atoms has been measured by means of laser induced fluorescence. A numerical calculation of the electron density distribution has been carried out. By solving the diffusion equation, considerable information concerning the beam electrons has been obtained. The position of the density maxima is seen to depend on the amount of the low energy beam electrons. From the shape of the radial density profiles it is seen that the divergence of the beam electrons increased with the length of the cathode fall. With the experimental density profiles, several collisional rates have been evaluated and used in a numerical calculation of the axial profiles of the titanium atoms and 3P(2) metastable argon atoms. A good agreement with the experimental profiles has been achieved in both cases.
Bibliographic Reference: Report: Jül-2655 DE (1992) 132 pp.
Availability: Available from Zentralbibliothek der Forschungszentrum Jülich GmbH, Postfach 1913, 5170 Jülich (DE)
Record Number: 199310023 / Last updated on: 1994-11-29
Original language: de
Available languages: de