Sputtering of amorphous C:H and C/B:H layers by argon ions
A pulsed argon ion gun (with energies from 0.4 to 1.5 keV) was used to sputter amorphous a-C:H and a-C/B:H thin films. Velocity distributions of sputtered B, C, H and O atoms were measured by laser induced fluorescence in the vacuum ultraviolet. Thompson distributions were fitted to these curves, giving surface energies of about 0.8 eV for H, 7.6 eV for C, and 5.6 eV for B atoms. The velocity distributions for atomic oxygen could not be fitted with a single value for the surface energy, but only with the superposition of two Thompson distributions with different energies (0.5 and 4.8 eV). For H atoms, the sputtering yield shows a strong fluence dependence, which is considerably stronger for a-C:H than for a-C/B:H layers.
Bibliographic Reference: Article: Journal of Nuclear Materials, Vol. 196-198 (1992) pp. 1065-1068
Record Number: 199310253 / Last updated on: 1994-11-29
Original language: en
Available languages: en