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Abstract

The energy and angular dependence of measured and calculated sputtering yield data is presented for a large number of projectile-target combinations. The target materials include elements, compounds and alloys. Most data are given for H, D and He bombardment, but data for selfsputtering and noble gas bombardment are also presented. The data for normal incidence as a function of projectile energy are fitted by a revised Bohdansky formula, and the angular dependence for a given projectile energy is fitted by the formula given by Yamamura. The fit parameters obtained for the energy and angular dependence of the different materials are compared, in order to deduce empirical universal formulae for these parameters. Finally, a table is given which includes the fit parameters for the energy dependence of the sputtering yield calculated with the deduced empirical formulae for a large variety of projectile-target combinations.

Additional information

Authors: ECKSTEIN W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);GARCIA-ROSALES C, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);ROTH J, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);OTTENBERGER W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Report: IPP 9/82 EN (1993) 342 pp.
Availability: Available from Max-Planck-Institut für Plasmaphysik, 8046 Garching bei München (DE)
Record Number: 199310682 / Last updated on: 1994-11-29
Category: PUBLICATION
Original language: en
Available languages: en