Microstructural evolution of non hydrogenated amorphous carbon under ion beam assistance
Amorphous carbon films have been deposited by ion beam assisted techniques and characterised by HRTEM, EELS, and positron anihilation spectroscopy. It was found that the momentum transfer of bombardment has a strong influence on the coatings' properties such as density, voids concentrations and sp(3) content. The results can be explained by an ion pinning effect at low ion energies and a damage induced graphitisation at high ion energies.
Bibliographic Reference: Paper presented: Ion beam plasma, laser stimulated deposition processes, Strasbourg (FR), May 3-7, 1993
Availability: Available from (1) as Paper EN 37702 ORA
Record Number: 199311051 / Last updated on: 1994-11-29
Original language: en
Available languages: en