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Amorphous carbon films have been deposited by ion beam assisted techniques and characterised by HRTEM, EELS, and positron anihilation spectroscopy. It was found that the momentum transfer of bombardment has a strong influence on the coatings' properties such as density, voids concentrations and sp(3) content. The results can be explained by an ion pinning effect at low ion energies and a damage induced graphitisation at high ion energies.

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Authors: ANDRÉ B, CEREM DEM, Grenoble (FR);ROSSI F, JRC Petten (NL);VAN VEEN A ET AL., IRI, Technische Universiteit Delft (NL);DELPLANCITE M P, Université Libre de Bruxelles, Service de Métallurgie et Electrochimie (BE)
Bibliographic Reference: Paper presented: Ion beam plasma, laser stimulated deposition processes, Strasbourg (FR), May 3-7, 1993
Availability: Available from (1) as Paper EN 37702 ORA
Record Number: 199311051 / Last updated on: 1994-11-29
Original language: en
Available languages: en