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Collision cascade sputtering may be influenced by the target temperature due to a modification of the collision cascade as well as by changes of the surface binding energy or heat of sublimation. Calculations with the computer simulation program TRIM.SP have shown that a small decrease of the surface binding energy has a strong nonlinear effect on the sputtering yield, especially at energies near the threshold energy for sputtering. For silver the heat of sublimation near the melting point is about 2.7 % lower than at room temperature. However, an increase of the sputtering yield of about 36 % for 60 eV deuterium ion bombardment at normal incidence was found. Due to the large sublimation rate of Ag at temperatures above about 850 K, sputtering yields measured at these temperatures show large uncertainties and it will be difficult to confirm experimentally the increase of the collisional sputtering yield with temperature.

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Authors: BEHRISCH R, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);ECKSTEIN W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 82 (1993) pp. 255-258
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