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Abstract

Noncrystalline hydrocarbon films were deposited from methane plasmas in an electron cyclotron resonance plasma reactor. The films were characterised by infrared spectroscopy and high energy ion beam analysis. Film properties were investigated as a function of the energy of ions impinging on the surface of the growing film. An abrupt change was found in the sp(3)/sp(2) ratio in the energy interval from 80 to 120 eV. Other film properties such as the refractive index, density, and hydrogen-to-carbon ratio exhibit a more or less monotonic dependence on the ion energy. The results are compared with published data on hydrocarbon films. An analytical model is developed to describe the energy dependence of the hydrogen fraction in the films. The results are also discussed on the basis of the fully constrained network model.

Additional information

Authors: REINKE P, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);JACOB W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);MÖLLER W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);MOLLER W, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE)
Bibliographic Reference: Article: Journal of Applied Physics, Vol. 74 (1993) No. 2, pp. 1354-1361
Record Number: 199311221 / Last updated on: 1994-11-29
Category: PUBLICATION
Original language: en
Available languages: en