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Abstract

This paper is based on a continuation of the work devoted to the study of the sputtered-particle spatial distributions under ion bombardment of solid surfaces. In cases when the initial target surface was flat and when under ion bombardment a surface topography did not essentially develop, the sputtered-particle spatial distributions were determined by two mechanisms - a cascade mechanism and a direct ejection. It was also found that a strongly developed surface topography can play an important role in shaping the sputtered-particle distribution due to both primary ion beam and sputtered-particle flux redistribution on the topographical elements at the surface. The sputtered-particle distributions can be influenced by the irradiated-target texture.

Additional information

Authors: ECKSTEIN W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);MASHKOVA E S, Moscow State University, Institute of Nuclear Physics (SU);MOLCHANOV V A, Moscow State University, Institute of Nuclear Physics (SU);SIDOROV A V, Moscow State University, Institute of Nuclear Physics (SU);ZHUKOVA Y N, Moscow State University, Institute of Nuclear Physics (SU)
Bibliographic Reference: Article: Applied Physics A, Vol. 57 (1993) pp. 271-277
Record Number: 199311543 / Last updated on: 1994-11-28
Category: PUBLICATION
Original language: en
Available languages: en