The effect of target texture and topography on the spatial distribution of material sputtered from tungsten
This paper is based on a continuation of the work devoted to the study of the sputtered-particle spatial distributions under ion bombardment of solid surfaces. In cases when the initial target surface was flat and when under ion bombardment a surface topography did not essentially develop, the sputtered-particle spatial distributions were determined by two mechanisms - a cascade mechanism and a direct ejection. It was also found that a strongly developed surface topography can play an important role in shaping the sputtered-particle distribution due to both primary ion beam and sputtered-particle flux redistribution on the topographical elements at the surface. The sputtered-particle distributions can be influenced by the irradiated-target texture.
Bibliographic Reference: Article: Applied Physics A, Vol. 57 (1993) pp. 271-277
Record Number: 199311543 / Last updated on: 1994-11-28
Original language: en
Available languages: en