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Abstract

The sputtering yield at low energies and at various angles of incidence has been investigated by computer simulation with the TRIM.SP program and compared to experimental data available. The question of the sputtering threshold energy is discussed in detail, and the processes responsible for sputtering at these low energies are studied. It is shown that for heavy ion sputtering the threshold depends on the angle of incidence. Analytical equations are derived which demonstrate that the inelastic energy loss plays an important role in the threshold for heavy projectiles.

Additional information

Authors: ECKSTEIN W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);GARCIA-ROSALES C, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);ROTH J, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);LASZLO J, Technical University of Budapest (HU)
Bibliographic Reference: Article: Nuclear Instruments & Methods in Physics Research B, Vol. 83 (1993) pp. 95-109
Record Number: 199311609 / Last updated on: 1994-11-28
Category: PUBLICATION
Original language: en
Available languages: en