Hardness and elasticity of diamond-like carbon films prepared by ion beam assisted sputter depositionFunded under: JRC-ADVMAT 2C
Hardness (H) and Young's modulus (Y) of non-hydrogenated amorphous carbon (a-C) films have been determined by an ultralow load depth-sensing nanoindenter to examine the dependence of the energy and momentum transferred to a depositing carbon atom by an assisting argon ion beam. The results indicate that the film formation process is momentum transfer controlled. The a-C films were prepared and analysed by a new procedure, in which the ion beam sputter deposited film was assisted by a focused argon ion beam. This method produces a film with a high central zone and progressive decreasing zones of energy and momentum transfer. By measuring H and Y in these different regions a large data set was obtained just from one film. From the analysis of two films, which were prepared at different assisting ion beam voltages of 100 and 300 volts respectively, it was found that H and Y display a uniform functional dependence only if plotted versus momentum transfer.
Bibliographic Reference: Paper presented: Diamond Films '93, Albufeira (PT), September 20-24, 1993
Availability: Available from (1) as Paper EN 38079 ORA
Record Number: 199410234 / Last updated on: 1994-11-28
Original language: en
Available languages: en