A survey on the errors of optical coordinate measuring probes
Optical probes are used in coordinate metrology for a variety of tasks where they are superior to mechanically contacting probes, either because of their high speed, sampling rate, absence of force-interaction with the object, small effective stylus size, or their ability to measure optical structures. In order to develop test procedures for optical probes, a representative set of triangulation probes, laser focus probes, video autofocus probes, and 2D-video probes were investigated with respect to more than 35 different error influences by numerical simulation, and by measurements on calibrated reference artefacts. An overview of the most important error mechanisms is given.
Bibliographic Reference: Paper presented: International Conference on Ultraprecision in Manufacturing Engineering, Aachen (DE), May 2-6, 1994
Availability: Available from (1) as Paper EN 38310 ORA
Record Number: 199410632 / Last updated on: 1994-11-28
Original language: en
Available languages: en