Community Research and Development Information Service - CORDIS

Abstract

Optical probes are used in coordinate metrology for a variety of tasks where they are superior to mechanically contacting probes, either because of their high speed, sampling rate, absence of force-interaction with the object, small effective stylus size, or their ability to measure optical structures. In order to develop test procedures for optical probes, a representative set of triangulation probes, laser focus probes, video autofocus probes, and 2D-video probes were investigated with respect to more than 35 different error influences by numerical simulation, and by measurements on calibrated reference artefacts. An overview of the most important error mechanisms is given.

Additional information

Authors: HÜSER-TEUCHERT D, PTB Braunschweig (DE);TRAPET E, PTB Braunschweig (DE);PFEIFER T, WZL Aachen (DE);SCHARSICH P, WZL Aachen (DE)
Bibliographic Reference: Paper presented: International Conference on Ultraprecision in Manufacturing Engineering, Aachen (DE), May 2-6, 1994
Availability: Available from (1) as Paper EN 38310 ORA
Record Number: 199410632 / Last updated on: 1994-11-28
Category: PUBLICATION
Original language: en
Available languages: en