Running waveguide discharge for inner coating of metal tubes
This article gives an overview of the experimental results on plasma behaviour and thin film deposition obtained from a running discharge technique inside a rectangular waveguide system. Amorphous hydrogenated carbon films were deposited over a length of 2.5 m on the inner wall of the assembled waveguide system. The average deposition rate was observed and the breakdown of a discharge in the metallic waveguide was studied in argon plasmas depending on magnetic field, microwave power and gas pressure. This plasma behaviour was investigated further by means of a power balance and plasma modelling in methane.
Bibliographic Reference: Article: Applied Physics Letters, Vol. 64 (1994) No. 25, pp. 3401-3403
Record Number: 199411140 / Last updated on: 1994-11-25
Original language: en
Available languages: en