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Abstract

This paper studies the extent to which the accuracy of quantitative analysis of X-ray photoelectron spectroscopy is affected by neglect of the shake-up electrons. Three sets of alloys (CuAu, CoNi and CuNi) were studied. It was found that the accuracy of quantification from first principles based on the intensity in a narrow energy range around the peak energy can lead to errors of up to 114 %. The error is discussed in terms of the importance of shake-up effects. When reference spectra are applied, these effects are reduced and the Shirley method for background estimation then yields compositions for the considered alloys that differ by between 2 % and 22 % from those determined with an algorithm that is based on a physical description of the inelastically scattered electrons.

Additional information

Authors: JANSSON C, Odense Universitet, Fysisk Institut (DK);TOUGAARD S, Odense Universitet, Fysisk Institut (DK)
Bibliographic Reference: Article: Journal Vacuum Science and Technology A, Vol. 12 (1994) No. 4, pp. 2332-2336
Record Number: 199411142 / Last updated on: 1994-11-25
Category: PUBLICATION
Original language: en
Available languages: en