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The paper reports the design, development and characterisation of electro-optical equipment suitable for distance measurements and three-dimensional gauging of surfaces of industrial interest. The equipment comprises a dual-wavelength heterodyne interferometer for absolute distance measurements with a range of 20 m and an accuracy of 0.1 mm, that is integrated with a macroscopic scale, adaptive profilometer for three-dimensional measurement of the shape to 1 mm. The performance of the equipment is well suited for effective operation in industrial metrology.

Additional information

Authors: DOCCHIO F, Università degli Studi di Brescia, Dipartimento di Elettronica per l'Automazione (IT);PERINI U, Sezione Diagnostica Elettroottica, CISE SpA, Milano (IT);TIZIANI H, Universität Stuttgart, Institut für Technische Optik (DE)
Bibliographic Reference: Article: Measurement Science and Technology, Vol. 5 (1994) pp. 807-815
Record Number: 199411499 / Last updated on: 1994-12-06
Original language: en
Available languages: en