A combined distance and surface profile measurement system for industrial applications : A European project
The paper reports the design, development and characterisation of electro-optical equipment suitable for distance measurements and three-dimensional gauging of surfaces of industrial interest. The equipment comprises a dual-wavelength heterodyne interferometer for absolute distance measurements with a range of 20 m and an accuracy of 0.1 mm, that is integrated with a macroscopic scale, adaptive profilometer for three-dimensional measurement of the shape to 1 mm. The performance of the equipment is well suited for effective operation in industrial metrology.
Bibliographic Reference: Article: Measurement Science and Technology, Vol. 5 (1994) pp. 807-815
Record Number: 199411499 / Last updated on: 1994-12-06
Original language: en
Available languages: en