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Abstract

This paper contains the nuclear reaction analysis of boron nitride coatings deposited by PACVD (Plasma Assisted Chemical Vapour Deposition). Cross-sections were measured for alpha-particle energies between 4 and 5 MeV and a laboratory scattering angle of 135 at the 7 MV Van de Graaff accelerator of IRMM, using thin polyimide enriched boron-10 and natural boron targets. Smooth regions in the cross-section energy functions within the same energy window allow the determination of the film stoichiometry.

Additional information

Authors: GIORGINIS G, JRC Geel (BE);MISAELIDES P, JRC Geel (BE);CRAMETZ A, JRC Geel (BE);CONTI M, JRC Geel (BE)
Bibliographic Reference: Paper presented: 13th International Conference on the Application of Accelerators in Research and Industry, Denton, Texas (US), November 7-10, 1994
Availability: Available from (1) as Paper EN 38545 ORA
Record Number: 199411527 / Last updated on: 1995-01-10
Category: PUBLICATION
Original language: en
Available languages: en
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