Improvements in the preparation and areal characterisation of 10B and 6LiF reference deposits
In this paper the preparation and characterisation of new series of 10B and 6LiF reference deposits are described. Important improvements in the resolution of the deposits obtained by designing and building new planetary rotating devices are presented. The results conclude that deposition homogeneity and edge sharpness could be improved significantly. A mask expansion during the vacuum deposition process is observed and discussed.
Bibliographic Reference: Paper presented: 17th World Conference of the INTDS, Bloomington (US), October 17-21, 1994
Availability: Available from (1) as Paper EN 38706 ORA
Record Number: 199411538 / Last updated on: 1995-01-10
Original language: en
Available languages: en