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Abstract

In this paper the preparation and characterisation of new series of 10B and 6LiF reference deposits are described. Important improvements in the resolution of the deposits obtained by designing and building new planetary rotating devices are presented. The results conclude that deposition homogeneity and edge sharpness could be improved significantly. A mask expansion during the vacuum deposition process is observed and discussed.

Additional information

Authors: PAUWELS J ET AL., JRC Geel (BE);GILLIAM D M, National Institute of Standards and Technology, Gaithersburg (US);GREENE G, National Institute of Standards and Technology, Gaithersburg (US)
Bibliographic Reference: Paper presented: 17th World Conference of the INTDS, Bloomington (US), October 17-21, 1994
Availability: Available from (1) as Paper EN 38706 ORA
Record Number: 199411538 / Last updated on: 1995-01-10
Category: PUBLICATION
Original language: en
Available languages: en
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