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Recent measurements of ranges and variances of 200-2000 eV H- and D-implanted Be, C and Si are compared to computer calculations using the TRIM.SP program. The calculations are in good agreement with the experimental data. The influence of different energy loss models on the mean ranges and widths of the depth distributions is examined. The calculations with the TRIM.SP are compared to results of calculations with the TRIM-92 and BABOUM codes.

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Authors: MAYER M, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);ECKSTEIN W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 94 (1994) pp. 22-26
Record Number: 199411556 / Last updated on: 1995-01-10
Original language: en
Available languages: en