Effect of ion beam assistance on the microstructure of nonhydrogenated amorphous carbon
Nonhydrogenated diamondlike carbon films have been prepared by dual ion beam sputtering and ion-beam-assisted magnetron. The assistance parameters, ion energy, ion mass, ion flux/atom flux, have been systematically varied, and the films characterised by Rutherford backscattering spectroscopy, high-resolution transmission electron microscopy, electron energy loss spectroscopy, positron annihilation spectroscopy, Raman spectroscopy, and nanoindentation. It is found that the density and the degree of disorder of the films goes through a maximum with ion energy, and the void concentration goes through a minimum. Microstructure analysis shows that the films are mostly sp2 bonded, with a maximum of about 16 % concentration of sp3 bonding from the largest values of density.
Bibliographic Reference: Article: Journal of Applied Physics, Vol. 75 (1994) No. 6, pp. 3121-3129
Record Number: 199411568 / Last updated on: 1995-01-10
Original language: en
Available languages: en