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Abstract

This paper presents the preparation of carbon films with up to 30 % nitrogen using an ion beam assisted magnetron with a N(2)(+)/N(+) beam at energies between 50 and 300 eV. The evolution of film density, composition, microstructure and mechanical properties of the films as a function of the deposition parameters is presented.

Additional information

Authors: ROSSI F, JRC Petten (NL);ANDRÉ B, CEREM, Centre d'Etudes Nucléaires de Grenoble (FR);VAN VEEN A ET AL., IRI, Delft University of Technology (NL);DUNLOP H, Pechiney CRV, Voreppe (FR);DELPLANCKE M P, Université Libre de Bruxelles, Service de Métallurgie et Electrochimie (BE);HUBBARD K, Los Alamos National Laboratory, Center for Materials Science (US);ANDRE B, CEREM, Centre d'Etudes Nucleaires de Grenoble (FR)
Bibliographic Reference: Article: Journal of Materials Research, Vol. 9 (1994) No. 9, pp. 2440-2449
Record Number: 199411626 / Last updated on: 1995-01-10
Category: PUBLICATION
Original language: en
Available languages: en