Auger electron spectroscopy studies on TiN(x)Funded under: JRC-ADVMAT 2C
A new method for the determination of N/Ti ratio for TiN(x) samples has been proposed. High energy resolution Auger spectra recorded of the Ti L(3)M(23)M(45) peak have shown that on nitridation of Ti to TiN(x) a second peak, labelled the L(3)M(23)hybrid peak, emerges at 3.9 eV below the L(3)M(23)M(45) peak in the raw data, which grows with the grade of nitridation. After Shirley background corrections a linear dependence between the ratio of the L(3)M(23)hybrid/L(3)M(23)M(45) peak height of the raw data and the N/Ti ratio was found. This relation can be used directly to evaluate the nitrogen content of an unknown TiN(x) compound by recording only the Ti L(3)M(23)M(45) region. The changes of the L(3)M(23)M(45) peak structure have been interpreted and compared with earlier calculations for Ti and TiN. Good agreement between experiment and theory was found, enabling a discussion of the valence electronic structure changes for Ti on nitridation.
Bibliographic Reference: Paper presented: ECASIA 93 : 5th Conference on Surface and Interface Analysis, Catania (IT), October 4-8, 1993
Availability: Available from (1) as Paper EN 37807 ORA
Record Number: 199510199 / Last updated on: 1995-02-21
Original language: en
Available languages: en