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Abstract

A revision and improvement of analytic formulae for calculating sputtering yields is performed, based on the large number of experimental and calculated sputtering yield data accumulated at IPP in the last three decades. The Bohdansky formula for calculating sputtering yields as a function of energy is revised by introducing a nuclear stopping cross-section based on an analytic fit to the Kr-C potential. New analytic expressions for the two fit parameters Q and E(th) of the Bohdansky formula are deduced. Yamamura's formula for the angular dependence of the sputtering yield is shown not to be valid for self-sputtering or for heavy projectiles at energies near the threshold.

Additional information

Authors: GARCIA-ROSALES C, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);ECKSTEIN W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);ROTH J, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Journal of Nuclear Materials, Vol. 218 (1994) pp. 8-17
Record Number: 199510217 / Last updated on: 1995-02-21
Category: PUBLICATION
Original language: en
Available languages: en
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