Development of in-process measurement techniques for optical quality and position of elements in small integrated optical systemsFunded under: FP3-MAT
Two optical measuring techniques were investigated for the non-destructive testing (NDT) of surface quality of small optical components during manufacturing, and to position such components with sub-micron accuracy in a production environment. The two approaches involved a lateral shearing interferometer and a dual-wavelength double-heterodyne differential interferometer. In each case, new mathematical tools were developed and a prototype was constructed. Accuracies up to 2 m(lambda) r.m.s. were achieved.
Bibliographic Reference: EUR 16104 EN (1995) 107 pp., MF, ECU 8
Record Number: 199510242 / Last updated on: 1995-02-21
Original language: en
Available languages: en