Development of a reference material and reference method to provide a calibration of the instrument intensity scale for differential AESFunded under: FP3-MAT
The irreproducibility of Auger electron spectra (AES) recorded in different laboratories arises through uncalibrated instrument functions. For spectra recorded in the direct mode, a calibration method and a set of reference materials have been developed which give the calibration for an instrument to convert spectra over the energy range 10 to 2500 eV to true spectra with a standard deviation of 3 %. In this work, a reference material of solid copper and gold is developed with reference data and a reference method to provide a similar calibration for AES recorded in the differential mode using a 5 keV electron beam incident at 30 to the surface normal. The calibration involves the use of both 5 and 10 eV sinusoidal analogue modulations and provides nine calibration points between 60 and 2100 eV on the energy scale. Tests using cylindrical mirror analyser and spherical sector instruments show that a calibration accuracy of +/- 5 % may be achieved.
Bibliographic Reference: EUR 15420 EN (1994) 25 pp., MF, ECU 4
Record Number: 199510287 / Last updated on: 1995-03-08
Original language: en
Available languages: en