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Abstract

The main task of the project has been to investigate the capabilities of a scanning tunnelling microscopy (STM) based method for micro roughness and micro hardness measurements and assess the accuracy and reproducibility in the submicron range. The goal has also been to cover roughness in the range of R(a) values between 1 nm and 0.5 micron and Vickers micro hardness indentations with diagonal lengths smaller than 20 micron. This has been fulfilled by the development of STM microscopes, a positioning device, an indenting device and the implementation of commercial microscopes. Image processing software has been developed to produce reliable calibration data and roughness and micro hardness numbers from STM images. A circulation of artefacts showed that these devices were capable of measuring with an accuracy of better than 10 % in the nanometre and micrometre range and that the roughness and hardness values were consistent with classical techniques in the range where they overlapped.

Additional information

Authors: CARNEIRO K ET AL., Danish Institute of Fundamental Metrology, Lundtoftevej (DK);JUSKO O, Physikalisch-Technische Bundesanstalt, Braunschweig (DE);WILKENING G, Physikalisch-Technische Bundesanstalt, Braunschweig (DE);BARBATO G, Istituto di Metrologia "G. Colonnetti", Torino (IT);PICOTTO G B, Istituto di Metrologia "G. Colonnetti", Torino (IT);GORI G, GF Galileo SMA srl, Campi Bisenzio (IT);LIVI S, GF Galileo SMA srl, Campi Bisenzio (IT);HUGHES G, Irish National Science and Technology Agency, Glasnevin, Dublin (IE);MCQUOID H, Irish National Science and Technology Agency, Glasnevin, Dublin (IE)
Bibliographic Reference: EUR 16145 EN (1995) 109 pp., MF, ECU 8
Availability: (2)
Record Number: 199510354 / Last updated on: 1995-03-21
Category: PUBLICATION
Original language: en
Available languages: en