Scanning tunnelling microscopy methods for roughness and micro hardness measurementsFunded under: FP3-MAT
The main task of the project has been to investigate the capabilities of a scanning tunnelling microscopy (STM) based method for micro roughness and micro hardness measurements and assess the accuracy and reproducibility in the submicron range. The goal has also been to cover roughness in the range of R(a) values between 1 nm and 0.5 micron and Vickers micro hardness indentations with diagonal lengths smaller than 20 micron. This has been fulfilled by the development of STM microscopes, a positioning device, an indenting device and the implementation of commercial microscopes. Image processing software has been developed to produce reliable calibration data and roughness and micro hardness numbers from STM images. A circulation of artefacts showed that these devices were capable of measuring with an accuracy of better than 10 % in the nanometre and micrometre range and that the roughness and hardness values were consistent with classical techniques in the range where they overlapped.
Bibliographic Reference: EUR 16145 EN (1995) 109 pp., MF, ECU 8
Record Number: 199510354 / Last updated on: 1995-03-21
Original language: en
Available languages: en