Community Research and Development Information Service - CORDIS

Abstract

Present practice in engineering surface metrology is dominated by the contact stylus instrument. Standards for stylus measurements are well established and stylus measurement values are widely used in surface specifications. The technique has severe limitations in relation to the majority of measurement needs. Being a contact method its use can change, or damage, the surface. Being a line trace method it can only provide three dimensional surface information via a laborious and extremely slow process of successive parallel tracing. This project investigated, developed and evaluated optical techniques for non-contact areal measurement. The techniques explored were: (i) phase contrast; (ii) infrared total integrated and angle resolved scattering; (iii) differential shearing interferometry and projected fringe; (iv) scanning differential heterodyne interferometry; (v) Scanning confocal microscopy; (vi) high speed laser scanning. A range of specially fabricated test pieces was produced and used to evaluate these techniques and to examine the relationship with stylus measurement.

Additional information

Authors: SIMMONDS W H ET AL., SIRA Ltd., Chislehurst (GB);TRIPP J, SKF-Engineering Research Centre BV, Nieuwegein (NL);VELZEL C H F, Nederlandse Philips Bedrijven BV, Eindhoven (NL);MATTSSON L, Institute of Optical Research, Stockholm (SE);BJUGGREN M, Institute of Optical Research, Stockholm (SE);TIZIANI H J, Universität Stuttgart (DE);JORDAN H J, Universität Stuttgart (DE)
Bibliographic Reference: EUR 16161 EN (1995) 123 pp., MF, ECU 8
Availability: (2)
Record Number: 199510631 / Last updated on: 1995-06-15
Category: PUBLICATION
Original language: en
Available languages: en