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Abstract

This paper reviews areas of surface science in which low-energy ions (with a few keV of kinetic energy) are used successfully for investigating surface properties. These studies include composition analysis in the monolayer regime, structure analysis of single crystal surfaces and thin films, surface modification due to sputtering and equilibration, and inelastic processes due to charge exchange and energy loss. Examples from recent studies are given to discuss the relevant physical processes.

Additional information

Authors: TAGLAUER E, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 98 (1995) pp. 392-399
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