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A plasma simulator facility has been developed at JRC Ispra, in which target surface conditions can be monitored during plasma implantation by qualitative secondary neutral mass spectrometry (SNMS). This paper presents the measurements of deuterium re-emission from a SS 316L sample after a 99 % D(+)(3) plasma bombardment at various particle fluxes and energies. From these data, a characteristic recycling time, after which 63 % of the maximum number of re-emitted particles is achieved, has been evaluated. These measurements confirm that recycling is a fast running process with characteristic times in the range 2 to 4 seconds. It is strongly dependent upon the impinging particle flux while target temperature and particle energy do not play a significant role. Moreover, the chemical composition of the recycling flux is pure molecular deuterium.

Additional information

Authors: PERUJO A, JRC Ispra (IT);CAMPOSILVAN J, JRC Ispra (IT);TOMINETTI S, Politecnico di Torino, Dipartimento di Energetica (IT);ALBERICI S, Politecnico di Torino, Dipartimento di Energetica (IT)
Bibliographic Reference: Paper presented: 11th International Conference on Plasma Surface Interactions, Mito (JP), May 23-27, 1994
Availability: Available from (1) as Paper EN 38471 ORA
Record Number: 199511122 / Last updated on: 1995-08-22
Original language: en
Available languages: en
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