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Abstract

Laser-induced fluorescence (LIF) was applied at the B-X transition of the CH radical to measure the absolute densities of CH radicals in an electron-cyclotron resonance methane plasma. The absolute experimental uncertainty is only approximately 30 % as a result of a new calibration procedure. The experimental setup was calibrated through the comparison of the LIF signal of N(2)(+) with that of CH. The absolute N(2)(+) density was derived from the spatially resolved N(2)(+) LIF signal and the line-averaged electron density as measured with microwave interferometry.

Additional information

Authors: ENGELHARD M, ;JACOB W, ;MÖLLER W, ;KOCH A W,
Bibliographic Reference: Article: Applied Optics, Vol. 34 (1995) No. 21, pp. 4542-4551
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