Determination of the composition of TiN(x) and TiB(x)N(Y) films by AES
For the determination of x and y of TiN(x) and TiB(x)N(y) coatings two Auger methods are presented, one circumventing and the other minimising the difficulties arising from the overlap of the KL(23)L(23) and L(3)M(23)M(23) peaks of N and Ti respectively. The first method, developed for TiN(x) coatings, is based on the L(3)M(23)M(45) valence band peak of Ti which develops a distinct second peak on nitridation, 3.9 eV below the main peak, labelled the L(3)M(23) hybrid peak. For TiB(x)N(y) coatings the N/Ti ratio is obtained from the L(3)M(23)M(23)/L(3)M(23)M(45) peak intensity ratio for Ti. To minimise influences of the fine structure and improve the accuracy of the method, the negative peak excursions were artificially broadened. The N/Ti ratio so obtained is used in combination with the B concentration determined from the KL(23)L(23) peak of B to yield the Ti-B-N composition.
Bibliographic Reference: Article: 2. Naturforsch, Vol. 50a (1995) pp. 624-630
Record Number: 199511196 / Last updated on: 1995-10-10
Original language: en
Available languages: en