Modifications to the EDS detector of an electron scanning microscope with field emission source
This report discusses various problems encountered in fitting a windowless Si-Li link detector to a scanning microscope with a field emission electron source. Despite the inherent instability of the cold-cathode emission gun used, it was possible to correct for fluctuations by monitoring the beam current and adjusting spectrum acquisition time accordingly. Linearity of this compensation system proved adequate at all voltages. Slight loss of vacuum in the crystal housing, causing icing on the detector, was completely eliminated by repairing the detector unit. Interference from stray electromagnetic fields was reduced by better earthing of the instrumentation and disconnection of coaxial cables for the mapping.
Bibliographic Reference: Paper presented: SIME '95 - XX Congresso di Microscopia Elettronica, Rimini (IT), September 11-14, 1995
Availability: Available from (1) as Paper IT 39264 ORA
Record Number: 199511290 / Last updated on: 1995-11-23
Original language: it
Available languages: it