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A rigorous numerical electromagnetic method, based on the use of a piecewise description of the field inside a lamellar grating using Legendre polynomials is discussed. This method allows the accurate calculation, for both TE and TM polarised incident light, of the eigenvalues of lossless and highly conducting lamellar gratings using simple eigenvalue-eigenvector algorithms. The resulting eigenfunctions can then be used in conjunction with appropriate projections of the boundary conditions to calculate the diffracted field from extremely deep rectangular surface relief structures. The convergence of this method is tested and results are compared to those available in the literature. The method also allows non-implicit power conservation to be used as a test of convergence for both dielectric and conducting gratings. Some comments regarding the use of this method for multi-layer structures with slanted edges are also made.

Additional information

Authors: KÖRNER T O, Ludwig-Maximillians-Universität, Laser-Forschungslabor an der Urologischen Klinik, München (DE);SHERIDAN J T, JRC Ispra (IT);SCHWIDER J, Physikalisches Institut de Universität Erlangen (DE);KORNER T O, Ludwig-Maximillians-Universitat, Laser-Forschungslabor an der Urologischen Klinik, Munchen (DE)
Bibliographic Reference: Article: Optik, Vol. 99 (1995) No. 3, pp. 95-106
Record Number: 199511313 / Last updated on: 1995-11-23
Original language: en
Available languages: en