The sputtering of aluminium oxide by argon ionsFunded under: JRC-ADVMAT 2C
The experimental values for the sputtering losses of polycrystalline Al(2)O(3) obtained for 50 keV Ar(+) ions do not agree with those predicted by the TRIM or PROFILE codes. The sputtering loss of Al(2)O(3) by 100 keV and 200 keV Ar(+) ions for fluences between 1 x 1.0E17 and 10 x 1.0E17 was 10-20 nm. This appears to be anomalous behaviour.
Bibliographic Reference: EUR 15410 EN (1993) 6 pp., FS, free of charge
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Record Number: 199511600 / Last updated on: 1995-12-12
Original language: en
Available languages: en