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The experimental values for the sputtering losses of polycrystalline Al(2)O(3) obtained for 50 keV Ar(+) ions do not agree with those predicted by the TRIM or PROFILE codes. The sputtering loss of Al(2)O(3) by 100 keV and 200 keV Ar(+) ions for fluences between 1 x 1.0E17 and 10 x 1.0E17 was 10-20 nm. This appears to be anomalous behaviour.

Additional information

Authors: GAUTSCH O, JRC Ispra (IT)
Bibliographic Reference: EUR 15410 EN (1993) 6 pp., FS, free of charge
Availability: Available from Joint Research Centre, Publication Department, I-21020 Ispra (Va.) (IT)
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