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The method of prompt charged particle activation analysis (PCPAA) for the characterization of light-element thin layers is presented. The difference between the standard CPAA and the PCPAA lies in the evaluation of the cross-section integral. In the first case the whole energy of the analysing particle is considered (the material thickness is greater than the particle range), while in the second case the energy loss in the thin layer has to be known. The energy loss is derived from Rutherford backscattering spectrometry (RBS) spectra of the projectiles on the sample substrate in combination with range-energy tables. The PCPAA technique is used for the stoichiometric analysis of diamondlike coatings. This is demonstrated by the analysis of a boron-nitride thin film on a stainless steel backing by inducing (alpha, p) nuclear reactions on boron and nitrogen.

Additional information

Authors: GIORGINIS G, JRC Geel (BE)
Bibliographic Reference: Paper presented: 12th International Conference on Ion Beam Analysis, Tempe (US), May 22-26, 1995
Availability: Available from (1) as Paper EN 39119 ORA
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