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Abstract

Based on X-ray diffraction and infrared spectroscopy measurements, BN thin films grown by plasma enhanced chemical vapour deposition (PECVD) on silicon substrates have been studied with the aim of identifying the thin film phase. While in the infrared spectra the characteristic bands of the hexagonal phase were detected, in the X-ray diffraction pattern only some reflections belonging to the cubic BN phase were found. Structural models were developed to explain the apparent inconsistency between the 2 sets of data. Static disorder effects allowed a consistent interpretation of the X-ray diffraction patterns to be obtained. For another set of samples, which also showed a characteristic hexagonal signal in the infrared (IR) data, the X-ray diffraction (XRD) pattern could not be indexed with any of the BN phases. In this case, the presence of molecular and ionic phases, associated with impurities, was considered in structural modelling studies.

Additional information

Authors: DEPERO L E, Universitá di Brescia, Istituto Nazionale di Fisica per la Materia, Dipartimento di Chimica e Fisica per i Materiali (IT);SANGALETTI L, Universitá di Brescia, Istituto Nazionale di Fisica per la Materia, Dipartimento di Chimica e Fisica per i Materiali (IT);SCHAFFNIT C, JRC Petten (NL);ROSSI F, JRC Petten (NL);GIBSON P N, JRC Ispra (IT)
Bibliographic Reference: Paper presented: 1995 MRS Fall Meeting, Boston Massachusetts (US), November 27 - December 1, 1995
Availability: Available from (1) as paper EN 39573 ORA
Record Number: 199610270 / Last updated on: 1996-03-18
Category: PUBLICATION
Original language: en
Available languages: en
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