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Abstract

Comparison of rigorous electromagnetic calculations and measurements of grating diffraction efficiencies were applied to estimate the profile of surface relief gratings. The depth of the gratings was estimated using a Linnik interferometer. Information regarding the grating duty cycle (filling factor) and edge slope could then be extracted. The inverse scatter process is inexpensive, non-destructive, and easy to carry out and its accuracy estimated. The results were applied to calibrate a manufacturing process involving writing with a laser-beam-writing system and etching using reactive ion etching. It is shown that a combination of TE and TM polarisation measurements and calculations can be used to extract a great deal of accurate metrological information.

Additional information

Authors: HEISSMEIER M, Universität Erlangen-Nürnberg, Physikalisches Institut, Erlangen (DE);SCHWIDER J, Universität Erlangen-Nürnberg, Physikalisches Institut, Erlangen (DE);SHERIDAN J T, JRC Ispra (IT)
Bibliographic Reference: Article: Optik (1996)
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