Non-Destructive Calibration of Micro-Photolithographic Grating Fabrication
In this report comparison of rigorous electromagnetic calculations and measurements of grating diffraction efficiencies are applied to estimate the profile of surface relief gratings. The depth of the gratings is estimated using a Linnik interferometer. Information regarding the grating duty cycle (filling factor) and edge slope can then be extracted. The inverse scatter process is inexpensive, non-destructive, and easy to carry out and its accuracy is estimated. The results are applied to calibrate a manufacturing process involving writing with a laser-beam-writing system and etching using reactive ion etching. It is shown that a combination of transverse electric (TE) and transverse magnetic (TM) polarization measurements and calculations can be used to extract a great deal of accurate metrological information.
Bibliographic Reference: EUR 16374 EN (1996) 31pp., FS, free of charge
Availability: Available from the Public Relations and Publications Unit, JRC Ispra, I-21020 Ispra (IT)
Record Number: 199610531 / Last updated on: 1996-05-13
Original language: en
Available languages: en