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Abstract

Present calibration practices on scanning nuclear microprobes (SNM) are reviewed together with the standards and materials available for that purpose. New test objects, fabricated by microstructural techniques, are proposed to complement the existing standards. These will primarily serve to test the halo of a microbeam, to determine a possible dependence of the focused spot size on the scanning displacement, and to verify the linearity of the scanning itself. Special test structures must be made available to verify distribution analysis results of the scanned microbeam techniques. The relative merits of future calibration standards and test objects have been discussed in the context of their analytical applications and requirements for their production defined.

Additional information

Authors: WÄTJEN U, JRC Geel (BE);PLOMPEN A, JRC Geel (BE)
Bibliographic Reference: Paper presented: 4th International Conference on Nuclear Microprobe Technology and Applications, Shanghai (CN), October 10-14, 1994
Availability: Available from (1) as Paper EN 38731 ORA
Record Number: 199610635 / Last updated on: 1996-05-27
Category: PUBLICATION
Original language: en
Available languages: en
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