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Plasma deposited, hydrogenated carbon thin films were investigated by infrared analysis and high energy ion analysis. The absolute quantities of hydrogen in the films, as measured by ion beam analysis, and the strengh of the C-H vibrational bands around 3000 cm{-1} were compared to determine the average absorption strength for these bands. The absorption strength was found to vary by a factory of 4 depending on the structure of the hydrocarbon films.

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Authors: JACOB W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);UNGER M, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Appl. Phys. Lett., Vol. 68 (1996) No. 4, pp. 475-477
Record Number: 199610694 / Last updated on: 1996-06-21
Original language: en
Available languages: en