A combined XPS/AES/GAXRD/EXAFS Investigation of Ti-B-N Hard Coating Materials
Ti-B-N coatings with a three phase TiB(2) + TiN + BN composition have been deposited by reactive magnetron sputtering x-ray photoelectron spectroscopy (XPS), atomic emission spectroscopy (AES), glancing angle x-ray diffraction (GAXRD) and extended x-ray absorption fine structure (EXAFS) have been employed to characterize the films and understand the relation between chemical composition and microstructure. The Ti based phases are dominated by the presence of nanocrystalline TiB(2), the grain size of which decreases to an unmeasurably low value with increasing N content. Evidence of TiB(2), TiN and BN bonding is found in the XPS spectra and the phase composition has been found to be in good agreement with that predicted by the phase diagram. The BN phase present is shown by XPS and AES to be h-BN.
Bibliographic Reference: Article : Journal of Vacuum Science and Technology A (1996)
Record Number: 199610781 / Last updated on: 1996-08-16
Original language: en
Available languages: en