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Calibrated metal multilayers prepared by physical vapour deposition lend themselves for calibration of the depth scale (or sputter erosion rate) especially in techniques obtaining the depth information through sputtering (SIMS, AES). The procedure of calibrating the areal density of the individual evaporated layers is unique, because it provides for an optimal traceability to the metrological units of mass and length by making use of an ultrahigh vacuum microbalance. Non-destructive depth profiling with RBS is used to determine the uniformity of the individual layers. We have prepared multilayer systems consisting of up to 11 alternating layers (nominal thickness of each is 30 nm) of Ni-Al, Ni-Ti, Ni-Fe, Cr-Fe and Al-Ag on vitreous carbon substrates. Examples of RBS measurements demonstrate the sharp interfaces and the layer uniformity in these multilayer stacks.

Additional information

Authors: WÄTJEN U, JRC Geel (BE);RIETVELD P, JRC Geel (BE)
Bibliographic Reference: Paper presented: CMD-EPS' '96, Baveno (IT) April 22-26, 1996
Availability: Available from (1) as Paper EN 39725 ORA
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