The effect of the fibre target structure on the spatial distributions of sputtered atoms
The influence of the fibre target structure on the spatial distributions of sputtered particles has been investigated experimentally, analytically and with computer simulations. Rolled copper samples were bombarded by 30 keV energy argon ions at different angles of ion incidence. The experiment shows that the spatial distributions even at near normal ion incidence are elongated in the direction perpendicular to the rolling direction. Three-dimensional analytical treatment based on the approximation of the rolled surface by a periodical system of half-cylinders with smooth planes in between has been developed. This model explains not only the results for rolled copper presented in this work but also the results for other materials obtained earlier by the authors.
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 115 (1996) pp. 482-484
Record Number: 199611297 / Last updated on: 1996-11-11
Original language: en
Available languages: en