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Abstract

Surface composition modifications due to D(+) ion bombardment with energies between 10 eV and 1 keV temperatures ranging from 300 K to 1000 K and the consequences for the sputtering yields and chemical erosion have been investigated for SiC, TiC and graphites doped with 10 at% Si or 10 at% Ti. At D(+) ion energies below about 100 eV, a steady-state surface enrichment of the metal has been observed both in the carbides and in the doped graphites.
In both doped graphites after D(+) bombardment, the development of a cone structure has been observed. The tops of these cones consist of Si- or Ti-rich grains shielding the underlying graphite material from erosion. Thus, the steady-state metal surface enrichment under D(+) bombardment can be explained by considering the surface topography and the metal enrichment of the corresponding carbide.

Additional information

Authors: PLANK H, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);SCHWORER R, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);ROTH J, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Surface and Coatings Technology, Vol. 83 (1996) pp. 93-98
Record Number: 199611300 / Last updated on: 1996-11-11
Category: PUBLICATION
Original language: en
Available languages: en