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Abstract

At the Institute for Reference Materials and Measurements (IRMM) a facility for hydrogen profiling has been implemented. Two techniques are being used; Nuclear Resonant Reaction Analysis (NRRA) using the (1)H(15)N, alpha gamma)(12)C reaction and Elastic Recoil Detection Analysis (ERDA) using a He(+) ion beam. The ERDA chamber is a common type of scattering chamber with a load lock system for quick changing of the samples. NRRA is performed in a ultrahigh vacuum (UHV) chamber in which the samples can be cooled to liquid nitrogen temperature and sputter cleaned with a 5 kV ion gun. The 4.43 MeV gamma rays are detected using a 4 in x 4 in BGO detector. Using only passive shielding a detection limit of hydrogen in silicon of 5E18 atoms cm{-3} has been achieved. Experimental results which exemplify the major features of the facility are presented.

Additional information

Authors: PERSSON L, JRC Geel (BE);HULT M, JRC Geel (BE);GIORGINIS G, JRC Geel (BE);CRAMETZ A, JRC Geel (BE)
Bibliographic Reference: Paper presented: 14th International Conference on the Application of Accelerators in Research and Industry, Denton, Texas (US), November 6-9, 1996
Availability: Available from (1) as Paper EN 40190 ORA
Record Number: 199611480 / Last updated on: 1997-01-16
Category: PUBLICATION
Original language: en
Available languages: en
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