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Sputtering yields, reflection coefficients, and energy and angular distributions of sputtered atoms are investigated as functions of time. Cascades are created by 1 keV Ar projectiles in TaC, C and Ta targets for normal and oblique incidence. The binary collision approximation Monte Carlo program TRIM.SP is applied to calculate the time characteristics of sputtering.

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Authors: VICHEV R G, Katholieke Universiteit Leuven, Department of Metallurgy and Materials Engineering (BE);ECKSTEIN W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 122 (1997) pp. 215-223
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