Temporal aspects of sputtering of TaC, C, and Ta targets
Sputtering yields, reflection coefficients, and energy and angular distributions of sputtered atoms are investigated as functions of time. Cascades are created by 1 keV Ar projectiles in TaC, C and Ta targets for normal and oblique incidence. The binary collision approximation Monte Carlo program TRIM.SP is applied to calculate the time characteristics of sputtering.
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 122 (1997) pp. 215-223
Record Number: 199710554 / Last updated on: 1997-05-09
Original language: en
Available languages: en