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Abstract

The erosion behaviour of SiC, TiC and WC is investigated under deuterium bombardment at room temperature in the energy range between 20 eV and 1.5 keV. It is found that the dominant erosion mechanism for carbides is physical sputtering at ion energies above about 5 times the threshold energy. A surface layer depleted of C is formed at lower ion energies due to preferential erosion of C. In SiC, this is due to chemical erosion of C. In TiC, evidence is given that, at lower ion energies, the surface composition is governed by bombardment induced solid state reactions between Ti and C. In WC, the large mass ratio between W and C results in preferential erosion of C due to threshold effects.

Additional information

Authors: PLANK H, Max-Planck-Institute für Plasmaphysik, Garching bei München (DE);ECKSTEIN W, Max-Planck-Institute für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 124 (1997) pp. 23-30
Record Number: 199710696 / Last updated on: 1997-06-09
Category: PUBLICATION
Original language: en
Available languages: en