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Abstract

The interaction of hydrogen atoms and ions with hydrocarbon (C:H) films plays an important role in the understanding of growth and erosion of C:H films by plasma enhanced chemical vapour deposition. Elementary steps of the erosion mechanisms were identified and, the interaction of hydrogen plasmas with C:H films was studied. The Interaction of H atoms as well as ions leads to a modified layer with a few nanometer thickness at the plasma facing surface of the film. Infrared spectroscopy (IRS) was used to investigate this modified layer created at the surface of C:H films with a thickness of only 10 nm, deposited on an optical cavity substrate. For the interpretation and quantification of the IRS data, a formalism is presented. It allows the calculation of the imaginary part k of the refractive index n of the thin film samples from the measured IR spectra and includes multiple coherent reflections in the film itself, multiple incoherent reflections in the substrate, and takes into account the Kramers-Kronig relation between the real and imaginary part of the refractive index.

Additional information

Authors: VON KEUDELL A, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);JACOB W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Journal of Vacuum Science Technology A, Vol. 15 (1997) No. 2, pp. 402-407
Record Number: 199710811 / Last updated on: 1997-07-02
Category: PUBLICATION
Original language: en
Available languages: en