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Abstract

Three different sets of experimental parameters need to be calibrated in microprobe work. These are basic instrumental parameters such as the size of the beam spot and its halo, scanning parameters such as the scan width, linearity in scanning, influence of the beam deflection amplitude on the beam spot size and finally sensitivity factors for quantitative microdistribution analysis. Calibration methods, developed for beam spot size and scanning parameters in recent years, are discussed. A set of new reference materials and transfer standards for verifying those quantities, not covered by presently available materials and methods, is proposed.

Additional information

Authors: WÄTJEN U, JRC Geel (BE)
Bibliographic Reference: Paper presented: IAEA Advisory Group Meeting 'Element Analysis of Extremely Small Samples', Ljubljana (SI), July 2-5, 1996
Availability: Available from (1) as Paper EN 40339 ORA
Record Number: 199710848 / Last updated on: 1997-07-08
Category: PUBLICATION
Original language: en
Available languages: en
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