Investigation of the negative glow of abnormal rare gas glow discharges with and without high-frequency additional heating
The present report investigates the negative glow of an abnormal cold cathode glow discharge. It aims at describing the properties of the produced plasma at a relatively high density. A Langmuir probe was applied in order to measure the electron density, the electron temperature and the plasma potential. The electric field strength did not exceed 50 V/m in the negative glow and increased up to 400 V/m towards the cathode fall. By solving equations, agreement was found with the measured results. In order to raise the temperature of electrons in the negative glow, additional rf-power was coupled into it at a frequency of 13.56 MHz. As the electron temperature increased the density of the electrons decreased, unless the cold electrons turned out to be of high temperature. In order to scrutinise the readings, the laser-induced fluorescence was measured. The comparison resulted in good agreement.
Bibliographic Reference: Report: Jül-3369 DE (1997) 145pp.
Availability: Available from Forschungszentrum Jülich GmbH, Zentralbibliothek, 52425 Jülich (DE)
ISBN: ISSN 0944-2952
Record Number: 199711067 / Last updated on: 1997-09-23
Original language: de
Available languages: de